J.F. QUINIOU, G. REMOND, C.MILLOT, C. ROQUES-CARMES
LMS-ENSMM 25030 Besançon (1995)
Abstract : A modular instrument using either tactile or optical sensors for the metrology of surface topography is described. This apparatus, utilising mechanical (MSM) or optical (OSM) scanning microscopes, makes it possible to display and characterise 2D or 3D roughness (micron scale), surface corrugation (10 -100 micron scale) and macroscopic topography (millimeter scale). Models devised using homogeneisation theory allows comparison with experimental data. Many examples will be presented to illustrate the relevance of this apparatus in Microtechnique quality control.
